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| 名称:六氟乙烷 型号: | | | | |
六氟乙烷C2F6
商品详细介绍 |
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A colorless,nonflammable,compressed gas.(一种无色不燃压缩气体) |
Formula(分子式): |
C2F6 |
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Molecular weight(分子量): |
138.01g/mol |
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Boiling point(沸点): |
-78.2℃ |
-108.76°F |
Melting point(熔点): |
-100.7℃ |
-149.27°F |
Vapor pressure(蒸汽压): |
2965KPa(21.1℃) |
430Psia(70°F) |
Specific volume(比容): |
0.174m3/kg(21.1℃,101.325KPa) |
2.8ft3/lb(70°F,14.696psia) |
UN Number(UN号码): |
UN2193 |
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DOT Classification(DOT类别): |
2.2(Nonflammable Gas)(不燃性气体) |
DOT Lable(DOT标签): |
NON-FLAMMABLE GAS(不燃性气体) |
Grsde(级别): |
5N |
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Purity(纯度): |
99.999% |
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纯度规格 |
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Impurity(非组分): |
Specification(标准) |
Oxygen(氧): |
≤2.0 ppmv |
Nitrogen(氮): |
≤8.0 ppmv |
Carbon Dioxide(二氧化碳): |
≤0.5 ppmv |
Carbon Monoxide(一氧化碳): |
≤0.5 ppmv |
Other Organics(其他有机物): |
≤0.1 ppmv |
Water(水): |
≤1.5 ppmv |
Acidity as HF(酸化物,如氟化氢): |
≤0.1 ppmv |
包装 |
容积 |
重量 |
连接阀门 |
小钢瓶 |
44L |
43Kg |
CGA660 DISS716 |
应用:刻蚀气体/等离子刻蚀
| | 点击次数:2475 | |
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